Largest SiC aspherical mirror in the world, with a diameter of 4.03 meters.
Made by China's CIOMP
Aspherical mirrors are used in high-end optoelectronic instruments.
Such as EUV lithography machines, as well as ground and space telescopes
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Made by China's CIOMP
Aspherical mirrors are used in high-end optoelectronic instruments.
Such as EUV lithography machines, as well as ground and space telescopes
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CIOMP (Changchun Institute of Optics, Fine Mechanics and Physics)
Are tasked with the development of the light source for EUV lithography machines
Here's the former president of Chinese Academy of Sciences, looking at the EUV lithography machine's light source prototype
Are tasked with the development of the light source for EUV lithography machines
Here's the former president of Chinese Academy of Sciences, looking at the EUV lithography machine's light source prototype
CIOMP are also tasked with the development of the ultrahigh accuracy aspheric mirror used in the EUV lithography machines.
EUV lithography is the most complex machinery produced by human, naturally it takes time to develop, but China is getting there
EUV lithography is the most complex machinery produced by human, naturally it takes time to develop, but China is getting there
Together with:
CAS Institute of Optics and Electronics,
CAS Shanghai Institute of Optics and Fine Mechanics,
CAS Institute Microelectronics, Beijing Institute of Technology,
Harbin Institute of Technology,
Huazhong University of Science and Technology.
CAS Institute of Optics and Electronics,
CAS Shanghai Institute of Optics and Fine Mechanics,
CAS Institute Microelectronics, Beijing Institute of Technology,
Harbin Institute of Technology,
Huazhong University of Science and Technology.
Forms the core research and development institutes that is responsible for China's indigenous EUV lithography machines
Once China masters the lithography technology supply chain, we will be free from any and all restrictions
Once China masters the lithography technology supply chain, we will be free from any and all restrictions
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